Issued Patents All Time
Showing 26–50 of 173 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10610884 | Substrate processing system having susceptorless substrate support with enhanced substrate heating control | Kailash Kiran Patalay | 2020-04-07 |
| 10486183 | Methods and apparatus for delivering process gases to a substrate | — | 2019-11-26 |
| 10468242 | Lamp cross-section for reduced coil heating | — | 2019-11-05 |
| 10458040 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack +5 more | 2019-10-29 |
| 10453670 | Simplified lamp design | — | 2019-10-22 |
| 10409306 | Apparatus and methods for low temperature measurement in a wafer processing system | — | 2019-09-10 |
| 10410890 | Light pipe window structure for thermal chamber applications and processes | Aaron Muir Hunter, Anzhong Chang | 2019-09-10 |
| 10405375 | Lamphead PCB with flexible standoffs | Oleg V. Serebryanov, Dongming Iu | 2019-09-03 |
| 10376916 | Substrate processing system having susceptorless substrate support with enhanced substrate heating control | Kailash Kiran Patalay | 2019-08-13 |
| 10373859 | Support ring with masked edge | Mehran Behdjat, Norman L. Tam, Aaron Muir Hunter, Koji Nakanishi, Toshiyuki Nakagawa | 2019-08-06 |
| 10332763 | Lamp driver for low pressure environment | Oleg V. Serebryanov, Alexander Goldin | 2019-06-25 |
| 10327284 | Diffuser for lamp heating assembly | — | 2019-06-18 |
| 10319579 | Adapter for replaceable lamp | Oleg V. Serebryanov | 2019-06-11 |
| 10306708 | Absorbing reflector for semiconductor processing chamber | Kin Pong Lo, Paul Brillhart, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield +6 more | 2019-05-28 |
| 10271383 | Lamp base adapter design for baseless lamps | Aaron Miller, Oleg V. Serebryanov | 2019-04-23 |
| 10271382 | Circular lamp arrays | — | 2019-04-23 |
| 10256005 | Rotating substrate laser anneal | Shashank Sharma, Diwakar Kedlaya, Aaron Muir Hunter | 2019-04-09 |
| 10202707 | Substrate processing system with lamphead having temperature management | Paul Brillhart, Satheesh Kuppurao, Dongming Iu | 2019-02-12 |
| 10147623 | Pyrometry filter for thermal process chamber | Bruce E. Adams | 2018-12-04 |
| 10132003 | Heating modulators to improve epi uniformity tuning | Shu-Kwan LAU, Surajit Kumar, Zhiyuan Ye, Kartik Shah, Mehmet Tugrul Samir +1 more | 2018-11-20 |
| 10128197 | Bottom processing | Aaron Muir Hunter, Swaminathan Srinivasan | 2018-11-13 |
| 10128144 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Norman L. Tam, Jeffrey Tobin, Jiping Li +1 more | 2018-11-13 |
| 10083827 | Simplified lamp design | — | 2018-09-25 |
| 10077508 | Multizone control of lamps in a conical lamphead using pyrometers | Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2018-09-18 |
| 10056286 | Support ring with masked edge | Mehran Behdjat, Norman L. Tam, Aaron Muir Hunter, Koji Nakanishi, Toshiyuki Nakagawa | 2018-08-21 |