Issued Patents All Time
Showing 76–100 of 173 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9682398 | Substrate processing system having susceptorless substrate support with enhanced substrate heating control | Kailash Kiran Patalay | 2017-06-20 |
| 9659809 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Norman L. Tam, Jeffrey Tobin, Jiping Li +1 more | 2017-05-23 |
| 9640412 | Apparatus and method for enhancing the cool down of radiatively heated substrates | Wolfgang Aderhold, Blake Koelmel | 2017-05-02 |
| 9595459 | Managing thermal budget in annealing of substrates | Stephen Moffatt, Abhilash J. Mayur, Sundar Ramamurthy, Aaron Muir Hunter | 2017-03-14 |
| 9580835 | Multizone control of lamps in a conical lamphead using pyrometers | Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2017-02-28 |
| 9564349 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel, Alexander Lerner +1 more | 2017-02-07 |
| 9552989 | Apparatus and method for improved control of heating and cooling of substrates | Blake Koelmel, Norman L. Tam | 2017-01-24 |
| 9543172 | Apparatus for providing and directing heat energy in a process chamber | Joseph R. Johnson, John E. Gerling, Mathew Abraham, Aaron Muir Hunter, Aneesh Nainani | 2017-01-10 |
| 9536728 | Lamp for rapid thermal processing chamber | Khurshed Sorabji | 2017-01-03 |
| 9536729 | Tubular light source having overwind | — | 2017-01-03 |
| 9513052 | Linear high packing density for LED arrays | Joseph R. Johnson | 2016-12-06 |
| 9498845 | Pulse train annealing method and apparatus | Stephen Moffatt | 2016-11-22 |
| 9462636 | RTP lamp base with removal features | Douglas R. McAllister | 2016-10-04 |
| 9406653 | Integrated solution for solid state light sources in a process chamber | Joseph R. Johnson | 2016-08-02 |
| 9390950 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel, Alexander Lerner +1 more | 2016-07-12 |
| 9385004 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Norman L. Tam, Jeffrey Tobin, Jiping Li +1 more | 2016-07-05 |
| 9330955 | Support ring with masked edge | Mehran Behdjat, Norman L. Tam, Aaron Muir Hunter, Koji Nakanishi, Toshiyuki Nakagawa | 2016-05-03 |
| 9318360 | Linear high packing density for LED arrays | Joseph R. Johnson | 2016-04-19 |
| 9245786 | Apparatus and methods for positioning a substrate using capacitive sensors | Blake Koelmel, Errol C. Sanchez | 2016-01-26 |
| 9240341 | Top wafer rotation and support | Oleg V. Serebryanov, Aaron Muir Hunter | 2016-01-19 |
| 9230837 | Multizone control of lamps in a conical lamphead using pyrometers | Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2016-01-05 |
| 9184085 | Substrate supporting edge ring with coating for improved soak performance | Aaron Muir Hunter | 2015-11-10 |
| 9175908 | Lamphead atmosphere | — | 2015-11-03 |
| 9140647 | Test apparatus for reflective cavity characterization | Joseph R. Johnson, Mehran Behdjat | 2015-09-22 |
| 9130001 | Edge ring for a thermal processing chamber | Blake Koelmel, Abhilash J. Mayur | 2015-09-08 |