Issued Patents All Time
Showing 101–125 of 173 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9129794 | Tubular light source having overwind | — | 2015-09-08 |
| 9114479 | Managing thermal budget in annealing of substrates | Stephen Moffatt, Abhilash J. Mayur, Sundar Ramamurthy, Aaron Muir Hunter | 2015-08-25 |
| 9076828 | Edge ring for a thermal processing chamber | Blake Koelmel, Abhilash J. Mayur | 2015-07-07 |
| 9029739 | Apparatus and methods for rapid thermal processing | Aaron Muir Hunter, Thomas F. Soules, Alexander M. Rubenchik | 2015-05-12 |
| 8993933 | Top wafer rotation and support | Oleg V. Serebryanov, Aaron Muir Hunter | 2015-03-31 |
| 8979087 | Substrate supporting edge ring with coating for improved soak performance | Aaron Muir Hunter | 2015-03-17 |
| 8907247 | Annealing apparatus using two wavelengths of laser radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2014-12-09 |
| 8900889 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel, Alexander Lerner +1 more | 2014-12-02 |
| 8901518 | Chambers with improved cooling devices | Aaron Muir Hunter | 2014-12-02 |
| 8896837 | Test apparatus for reflective cavity characterization | Joseph R. Johnson, Mehran Behdjat | 2014-11-25 |
| 8890024 | Annealing apparatus using two wavelengths of continuous wave laser radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2014-11-18 |
| 8865602 | Edge ring lip | Wolfgang Aderhold, Blake Koelmel, Ilya Lavitsky | 2014-10-21 |
| 8821643 | In-situ chamber cleaning for an RTP chamber | Balasubramanian Ramachandran, Tae Jung Kim, Jung Hoon Sun, Joung-Woo Lee, Hwa Joong Lim +1 more | 2014-09-02 |
| 8772055 | Multizone control of lamps in a conical lamphead using pyrometers | Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2014-07-08 |
| 8765618 | Annealing apparatus using two wavelengths of continuous wave laser radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2014-07-01 |
| 8761587 | Apparatus and method for measuring radiation energy during thermal processing | Blake Koelmel, Aaron Muir Hunter | 2014-06-24 |
| 8755680 | Edge ring for a thermal processing chamber | Blake Koelmel, Abhilash J. Mayur | 2014-06-17 |
| 8744250 | Edge ring for a thermal processing chamber | Blake Koelmel, Abhilash J. Mayur | 2014-06-03 |
| 8724977 | System for non radial temperature control for rotating substrates | Wolfgang Aderhold, Aaron Muir Hunter | 2014-05-13 |
| 8698049 | Rapid thermal processing lamphead with improved cooling | Khurshed Sorabji, Kedarnath Sangam, Alexander Lerner | 2014-04-15 |
| 8653408 | Annealing apparatus using two wavelengths of continuous wave laser radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2014-02-18 |
| RE44712 | Lamp for rapid thermal processing chamber | Khurshed Sorabji | 2014-01-21 |
| 8582962 | Substrate processing chamber with dielectric barrier discharge lamp assembly | Kaushal K. Singh, Bruce E. Adams | 2013-11-12 |
| 8548311 | Apparatus and method for improved control of heating and cooling of substrates | Blake Koelmel, Norman L. Tam | 2013-10-01 |
| 8513626 | Method and apparatus for reducing patterning effects on a substrate during radiation-based heating | Balasubramanian Ramachandran, Aaron Muir Hunter | 2013-08-20 |