Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810367 | Equipment leveler | Jae Hwan Hong, Chang-Won Kim | 2017-11-07 |
| 8821643 | In-situ chamber cleaning for an RTP chamber | Balasubramanian Ramachandran, Tae Jung Kim, Joung-Woo Lee, Hwa Joong Lim, Sang Phil Lee +1 more | 2014-09-02 |