Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8821643 | In-situ chamber cleaning for an RTP chamber | Balasubramanian Ramachandran, Tae Jung Kim, Jung Hoon Sun, Joung-Woo Lee, Sang Phil Lee +1 more | 2014-09-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8821643 | In-situ chamber cleaning for an RTP chamber | Balasubramanian Ramachandran, Tae Jung Kim, Jung Hoon Sun, Joung-Woo Lee, Sang Phil Lee +1 more | 2014-09-02 |