Issued Patents All Time
Showing 51–75 of 173 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10053777 | Thermal processing chamber | Aaron Muir Hunter | 2018-08-21 |
| 10026630 | Retention and insulation features for lamp | Dongming Iu, Oleg V. Serebryanov | 2018-07-17 |
| 10020204 | Bottom processing | Aaron Muir Hunter, Swaminathan Srinivasan | 2018-07-10 |
| 9929037 | Sol gel coated support ring | — | 2018-03-27 |
| 9929027 | Easy access lamphead | Oleg V. Serebryanov | 2018-03-27 |
| 9922815 | Adapter for replaceable lamp | Oleg V. Serebryanov | 2018-03-20 |
| 9905444 | Optics for controlling light transmitted through a conical quartz dome | — | 2018-02-27 |
| 9905443 | Reflective deposition rings and substrate processing chambers incorporating same | Anantha K. Subramani, Xiaoxiong Yuan, Ashish Goel, Joung Joo Lee | 2018-02-27 |
| 9870919 | Process chamber having separate process gas and purge gas regions | Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2018-01-16 |
| 9863038 | Off-angled heating of the underside of a substrate using a lamp assembly | Maurice E. Ewert, Anantha K. Subramani, Umesh M. Kelkar, Chandrasekhar Balasubramanyam | 2018-01-09 |
| 9863043 | Window cooling using compliant material | Paul Brillhart | 2018-01-09 |
| 9845550 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack +5 more | 2017-12-19 |
| 9842759 | Support ring with masked edge | Mehran Behdjat, Norman L. Tam, Aaron Muir Hunter, Koji Nakanishi, Toshiyuki Nakagawa | 2017-12-12 |
| 9842753 | Absorbing lamphead face | Paul Brillhart, Satheesh Kuppurao, Balasubramanian Ramachandran, Zuoming ZHU | 2017-12-12 |
| 9839976 | Annealing apparatus using two wavelengths of radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2017-12-12 |
| 9832816 | Absorbing reflector for semiconductor processing chamber | Kin Pong Lo, Paul Brillhart, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield +6 more | 2017-11-28 |
| 9818587 | Off-angled heating of the underside of a substrate using a lamp assembly | Maurice E. Ewert, Anantha K. Subramani, Umesh M. Kelkar, Chandrasekhar Balasubramanyam | 2017-11-14 |
| 9814099 | Substrate support with surface feature for reduced reflection and manufacturing techniques for producing same | Shu-Kwan LAU, Paul Brillhart, Mehmet Tugrul Samir | 2017-11-07 |
| 9793145 | Support ring with encapsulated light barrier | — | 2017-10-17 |
| 9786529 | Pyrometry filter for thermal process chamber | Bruce E. Adams | 2017-10-10 |
| 9768043 | Quartz upper and lower domes | Anzhong Chang, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir +9 more | 2017-09-19 |
| 9754807 | High density solid state light source array | John E. Gerling, Oleg V. Serebryanov, Joseph R. Johnson | 2017-09-05 |
| 9748121 | Thermal coupled quartz dome heat sink | Mehmet Tugrul Samir, Paul Brillhart | 2017-08-29 |
| 9728471 | System for non radial temperature control for rotating substrates | Wolfgang Aderhold, Aaron Muir Hunter | 2017-08-08 |
| 9711382 | Dome cooling using compliant material | Paul Brillhart | 2017-07-18 |