Issued Patents All Time
Showing 126–150 of 173 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8490660 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Blake Koelmel, Alexander Lerner, Kedarnath Sangam, Khurshed Sorabji | 2013-07-23 |
| 8452166 | Apparatus and method for measuring radiation energy during thermal processing | Blake Koelmel, Aaron Muir Hunter | 2013-05-28 |
| 8404048 | Off-angled heating of the underside of a substrate using a lamp assembly | Maurice E. Ewert, Anantha K. Subramani, Umesh M. Kelkar, Chandrasekhar Balasubramanyam | 2013-03-26 |
| 8387557 | Method for forming silicon-containing materials during a photoexcitation deposition process | Kaushal K. Singh | 2013-03-05 |
| 8367983 | Apparatus including heating source reflective filter for pyrometry | Aaron Muir Hunter, Blake Koelmel, Bruce E. Adams | 2013-02-05 |
| 8314371 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel, Alexander Lerner +1 more | 2012-11-20 |
| 8314369 | Managing thermal budget in annealing of substrates | Stephen Moffatt, Abhilash J. Mayur, Sundar Ramamurthy, Aaron Muir Hunter | 2012-11-20 |
| 8314368 | Silver reflectors for semiconductor processing chambers | Kelly Churton, Mark E. Lindsay, Mischa Ann Plesha, Sage Berta | 2012-11-20 |
| 8294068 | Rapid thermal processing lamphead with improved cooling | Khurshed Sorabji, Kedarnath Sangam, Alexander Lerner | 2012-10-23 |
| 8283607 | Apparatus including heating source reflective filter for pyrometry | Aaron Muir Hunter, Blake Koelmel | 2012-10-09 |
| 8249436 | System for non radial temperature control for rotating substrates | Wolfgang Aderhold, Aaron Muir Hunter | 2012-08-21 |
| 8242407 | Annealing apparatus using two wavelengths of continuous wave laser radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2012-08-14 |
| 8222574 | Temperature measurement and control of wafer support in thermal processing chamber | Khurshed Sorabji, Alexander Lerner, Aaron Muir Hunter, Bruce E. Adams, Mehran Behdjat +1 more | 2012-07-17 |
| 8217574 | Lamp with internal fuse system | Balasubramanian Ramachandran, Nyi O. Myo, Akio Takahashi | 2012-07-10 |
| 8111978 | Rapid thermal processing chamber with shower head | Khurshed Sorabji, Wolfgang Aderhold, Aaron Muir Hunter, Alexander Lerner | 2012-02-07 |
| 8106591 | Lamp failure detector | Oleg V. Serebryanov, Alexander Goldin | 2012-01-31 |
| 8057602 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Blake Koelmel, Alexander Lerner, Kedarnath Sangam, Khurshed Sorabji | 2011-11-15 |
| 8057601 | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber | Blake Koelmel, Alexander Lerner, Kedarnath Sangam, Khurshed Sorabji | 2011-11-15 |
| 7985945 | Method for reducing stray light in a rapid thermal processing chamber by polarization | Blake Koelmel, Aaron Muir Hunter | 2011-07-26 |
| 7978964 | Substrate processing chamber with dielectric barrier discharge lamp assembly | Kaushal K. Singh, Bruce E. Adams | 2011-07-12 |
| 7933009 | Method and apparatus for verifying proper substrate positioning | Oleg V. Serebryanov, Alexander Lerner, Aaron Muir Hunter | 2011-04-26 |
| 7923933 | Lamp failure detector | Oleg V. Serebryanov, Alexander Goldin | 2011-04-12 |
| 7906402 | Compensation techniques for substrate heating processes | Bruce E. Adams | 2011-03-15 |
| 7867868 | Absorber layer candidates and techniques for application | Bruce E. Adams | 2011-01-11 |
| 7860379 | Temperature measurement and control of wafer support in thermal processing chamber | Aaron Muir Hunter, Bruce E. Adams, Mehran Behdjat, Rajesh S. Ramanujam | 2010-12-28 |