Issued Patents All Time
Showing 151–173 of 173 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7813895 | Methods for plasma matching between different chambers and plasma stability monitoring and control | Sairaju Tallavarjula, Aaron Muir Hunter, Johanes F. Swenberg, Robert Haney | 2010-10-12 |
| 7800081 | Pulse train annealing method and apparatus | Stephen Moffatt | 2010-09-21 |
| 7772134 | Method of annealing using two wavelengths of continuous wave laser radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2010-08-10 |
| 7651955 | Method for forming silicon-containing materials during a photoexcitation deposition process | Kaushal K. Singh | 2010-01-26 |
| 7648927 | Method for forming silicon-containing materials during a photoexcitation deposition process | Kaushal K. Singh | 2010-01-19 |
| 7612491 | Lamp for rapid thermal processing chamber | Khurshed Sorabji | 2009-11-03 |
| 7598150 | Compensation techniques for substrate heating processes | Bruce E. Adams | 2009-10-06 |
| 7595208 | Method of laser annealing using two wavelengths of radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2009-09-29 |
| 7547633 | UV assisted thermal processing | Yoshitaka Yokota | 2009-06-16 |
| 7509035 | Lamp array for thermal processing exhibiting improved radial uniformity | Corina E. Tanasa, Sundar Ramamurthy, Claudia Lai, Ravi Jallepally, Ramachandran Balasubramanian +3 more | 2009-03-24 |
| 7398693 | Adaptive control method for rapid thermal processing of a substrate | Tarpan Dixit, Dean Jennings, Balasubramanian Ramachandran, Aaron Muir Hunter, Wolfgang Aderhold +2 more | 2008-07-15 |
| 7279721 | Dual wavelength thermal flux laser anneal | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2007-10-09 |
| 7147359 | Lamp assembly having flexibly positioned rigid plug | Abhijit Desai, Apollo Havelind | 2006-12-12 |
| 7135392 | Thermal flux laser annealing for ion implantation of semiconductor P-N junctions | Bruce E. Adams, Dean Jennings, Abhilash J. Mayur, Vijay Parihar | 2006-11-14 |
| 7129440 | Single axis light pipe for homogenizing slow axis of illumination systems based on laser diodes | Bruce E. Adams, Dean Jennings, Abhilash J. Mayur, Vijay Parihar | 2006-10-31 |
| 7127367 | Tailored temperature uniformity | Balasubramanian Ramachandran, Ravi Jallepally, Sundar Ramamurthy, Raman Achutharaman, Brian Haas +1 more | 2006-10-24 |
| 7041931 | Stepped reflector plate | Dean Jennings, Brian Haas, Ajit Balakrishna, Sundar Ramamurthy, Aaron Muir Hunter +1 more | 2006-05-09 |
| 6888104 | Thermally matched support ring for substrate processing chamber | Aaron Muir Hunter, Balasubramanian Ramachandran, Jallepally Ravi, Sundar Ramamurthy, Vedapuram S. Achutharaman +1 more | 2005-05-03 |
| 6805466 | Lamphead for a rapid thermal processing chamber | — | 2004-10-19 |
| 6376804 | Semiconductor processing system with lamp cooling | Andreas Hegedus | 2002-04-23 |
| 6232707 | Wedge base lamp | Frederick Hetzel, Robert S. McFeely | 2001-05-15 |
| 5754005 | Electric lamps containing electrical leads of a molybdenum and tungsten alloy | George E. Sakoske, Wayne A. Lasch, Milan R. Vukcevich, Thomas H. Yu, Bernard W. Rachel +4 more | 1998-05-19 |
| 5389853 | Incandescent lamp filament with surface crystallites and method of formation | Laurence Bigio, Clyde L. Briant, Ronald H. Wilson, John Fredrick Ackerman | 1995-02-14 |