Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Monitoring laser processing of semiconductors by raman spectroscopy

Monitoring laser processing of semiconductors by raman spectroscopy

US Patent 9508608 · Granted Nov 29, 2016

Estimated economic value: $13,456,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Melt depth determination using infrared interferometric technique in pulsed lase2022
Laser noise elimination in transmission thermometry2022
Laser noise elimination in transmission thermometry2019
Method, terminal and system for cluster terminal to feed back downlink channel i2019
Melt depth determination using infrared interferometric technique in pulsed lase2019
Thermal processing apparatus2019
Support cylinder for thermal processing chamber2018
Process sheet resistance uniformity improvement using multiple melt laser exposu2018
Multiple beam combiner for laser processing apparatus2018
Apparatus and method of improving beam shaping and beam homogenization2018
Support cylinder for thermal processing chamber2017
Process sheet resistance uniformity improvement using multiple melt laser exposu2016