Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8951348 | Single-chamber sequential curing of semiconductor wafers | Krishnan Shrinivasan, Feng Wang, George D. Kamian, Mark Yam | 2015-02-10 |
| 8137465 | Single-chamber sequential curing of semiconductor wafers | Krishna Shrinivasan, Feng Wang, George D. Kamian, Mark Yam | 2012-03-20 |