Issued Patents All Time
Showing 26–48 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7109087 | Absorber layer for DSA processing | Luc Van Autryve, Chris Bencher, Dean Jennings, Haifan Liang, Abhilash J. Mayur +2 more | 2006-09-19 |
| 7078302 | Gate electrode dopant activation method for semiconductor manufacturing including a laser anneal | Yi Ma, Khaled Ahmed, Kevin Cunningham, Robert C. McIntosh, Abhilash J. Mayur +6 more | 2006-07-18 |
| 7041931 | Stepped reflector plate | Dean Jennings, Joseph M. Ranish, Brian Haas, Ajit Balakrishna, Sundar Ramamurthy +1 more | 2006-05-09 |
| 6987240 | Thermal flux processing by scanning | Dean Jennings, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien, Leonid M. Tertitski +1 more | 2006-01-17 |
| 6721605 | Multi-computer chamber control system, method and medium | Alexey Goder | 2004-04-13 |
| 6500266 | Heater temperature uniformity qualification tool | Henry Ho, Alexander M. Rubinchik, Aihua Chen, Abril Cabreros, Steven T. Li +1 more | 2002-12-31 |
| 6424880 | Multi-computer chamber control system, method and medium | Alexey Goder | 2002-07-23 |
| 6406179 | Sensor for measuring a substrate temperature | Bruce E. Adams, Aaron Muir Hunter, Alex Rubinchik, Paul A. O'Brien | 2002-06-18 |
| 6345909 | Apparatus for infrared pyrometer calibration in a thermal processing system | — | 2002-02-12 |
| 6226453 | Temperature probe with fiber optic core | Bruce W. Peuse | 2001-05-01 |
| 6183130 | Apparatus for substrate temperature measurement using a reflecting cavity and detector | Bruce E. Adams, Aaron Muir Hunter, Alex Rubinchik, Paul A. O'Brien | 2001-02-06 |
| 6179466 | Method and apparatus for measuring substrate temperatures | Bruce W. Peuse, Gary E. Miner, Aaron Muir Hunter, Peter A. Knoot, Jason Mershon | 2001-01-30 |
| 6179465 | Method and apparatus for infrared pyrometer calibration in a thermal processing system using multiple light sources | — | 2001-01-30 |
| 6151446 | Apparatus and method for thermally processing substrates including a processor using multiple detection signals | Aaron Muir Hunter, Abhilash J. Mayur | 2000-11-21 |
| 6086245 | Apparatus for infrared pyrometer calibration in a thermal processing system | — | 2000-07-11 |
| 6056433 | Method and apparatus for infrared pyrometer calibration in a thermal processing system | — | 2000-05-02 |
| 6007241 | Apparatus and method for measuring substrate temperature | Aaron Muir Hunter | 1999-12-28 |
| 5938335 | Self-calibrating temperature probe | — | 1999-08-17 |
| 5848842 | Method of calibrating a temperature measurement system | Bruce W. Peuse, Gary E. Miner | 1998-12-15 |
| 5820261 | Method and apparatus for infrared pyrometer calibration in a rapid thermal processing system | — | 1998-10-13 |
| 5762419 | Method and apparatus for infrared pyrometer calibration in a thermal processing system | — | 1998-06-09 |
| 5755511 | Method and apparatus for measuring substrate temperatures | Bruce W. Peuse, Gary E. Miner | 1998-05-26 |
| 5660472 | Method and apparatus for measuring substrate temperatures | Bruce W. Peuse, Gary E. Miner | 1997-08-26 |