| 9737959 |
Thermal processing by scanning a laser line beam |
Dean Jennings, Mark Yam, Abhilash J. Mayur, Vernon Behrens, Leonid M. Teritski +1 more |
2017-08-22 |
| 8829393 |
Scanned laser light source |
Dean Jennings, Mark Yam, Abhilash J. Mayur, Vernon Behrens, Leonid M. Tertitski +1 more |
2014-09-09 |
| 8288685 |
Thermal flux processing by scanning a focused line beam |
Dean Jennings, Mark Yam, Abhilash J. Mayur, Vernon Behrens, Leonid M. Tertitski +1 more |
2012-10-16 |
| 8178819 |
Thermal flux processing by scanning a focused line beam |
Dean Jennings, Mark Yam, Abhilash J. Mayur, Vernon Behrens, Leonid M. Tertitski +1 more |
2012-05-15 |
| 7875829 |
Thermal flux processing by scanning a focused line beam |
Dean Jennings, Mark Yam, Abhilash J. Mayur, Vernon Behrens, Leonid M. Tertitski +1 more |
2011-01-25 |
| 7872209 |
Thermal flux processing by scanning a focused line beam |
Dean Jennings, Mark Yam, Abhilash J. Mayur, Vernon Behrens, Leonid M. Tertitski +1 more |
2011-01-18 |
| 6987240 |
Thermal flux processing by scanning |
Dean Jennings, Mark Yam, Abhilash J. Mayur, Vernon Behrens, Leonid M. Tertitski +1 more |
2006-01-17 |
| 6406179 |
Sensor for measuring a substrate temperature |
Bruce E. Adams, Aaron Muir Hunter, Alex Rubinchik, Mark Yam |
2002-06-18 |
| 6183130 |
Apparatus for substrate temperature measurement using a reflecting cavity and detector |
Bruce E. Adams, Aaron Muir Hunter, Alex Rubinchik, Mark Yam |
2001-02-06 |
