Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406179 | Sensor for measuring a substrate temperature | Bruce E. Adams, Aaron Muir Hunter, Mark Yam, Paul A. O'Brien | 2002-06-18 |
| 6183130 | Apparatus for substrate temperature measurement using a reflecting cavity and detector | Bruce E. Adams, Aaron Muir Hunter, Mark Yam, Paul A. O'Brien | 2001-02-06 |