Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8236706 | Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structures | Bruce W. Peuse, Yaozhi Hu, Paul Janis Timans, Guangcai Xing, Wilfried Lerch +4 more | 2012-08-07 |
| 7977258 | Method and system for thermally processing a plurality of wafer-shaped objects | Zsolt Nenyei, Paul Janis Timans, Wilfried Lerch, Juergen Niess, Manfred Falter +6 more | 2011-07-12 |
| 7151060 | Device and method for thermally treating semiconductor wafers | Georg Roters, Steffen Frigge, Yao Zhi Hu, Regina Hayn, Jens-Uwe Sachse +2 more | 2006-12-19 |
| 6706643 | UV-enhanced oxy-nitridation of semiconductor substrates | Yao Zhi Hu | 2004-03-16 |
| 6707011 | Rapid thermal processing system for integrated circuits | Yao Zhi Hu | 2004-03-16 |
| 6600138 | Rapid thermal processing system for integrated circuits | Markus Hauf, Yao Zhi Hu | 2003-07-29 |
| 6451713 | UV pretreatment process for ultra-thin oxynitride formation | Yao Zhi Hu, Sagy Levy, Jeffrey C. Gelpey | 2002-09-17 |
| 6403923 | System for controlling the temperature of a reflective substrate during rapid heating | Yao Zhi Hu, Randhir P. S. Thakur, Arnon Gat | 2002-06-11 |
| 6359263 | System for controlling the temperature of a reflective substrate during rapid heating | Yao Zhi Hu, Randhir P. S. Thakur, Arnon Gat | 2002-03-19 |
| 6303524 | High temperature short time curing of low dielectric constant materials using rapid thermal processing techniques | Rahul Sharangpani | 2001-10-16 |
| 6204484 | System for measuring the temperature of a semiconductor wafer during thermal processing | Yao Zhi Hu | 2001-03-20 |
| 6200023 | Method for determining the temperature in a thermal processing chamber | Yao Zhi Hu, Randhir P. S. Thakur | 2001-03-13 |
| 6075922 | Process for preventing gas leaks in an atmospheric thermal processing chamber | Yao Zhi Hu, Yuval Wasserman | 2000-06-13 |
| 5773871 | Integrated circuit structure and method of fabrication thereof | John M. Boyd, Joseph P. Ellul | 1998-06-30 |
| 5726084 | Method for forming integrated circuit structure | John M. Boyd, Joseph P. Ellul | 1998-03-10 |
| 5516710 | Method of forming a transistor | John M. Boyd, Joseph P. Ellul | 1996-05-14 |
| 5362669 | Method of making integrated circuits | John M. Boyd, Joseph P. Ellul | 1994-11-08 |
| 5352923 | Trench resistors for integrated circuits | John M. Boyd, Joseph P. Ellul | 1994-10-04 |
| 5316978 | Forming resistors for intergrated circuits | John M. Boyd, Joseph P. Ellul | 1994-05-31 |
| 5296258 | Method of forming silicon carbide | Joseph P. Ellul | 1994-03-22 |
| 4996081 | Method of forming multiple nitride coating on silicon | Joseph P. Ellul | 1991-02-26 |
| 4968641 | Method for formation of an isolating oxide layer | Alexander Kalnitsky, Joseph P. Ellul, Roger S. Abbott | 1990-11-06 |
| 4859303 | Method and apparatus for removing coating from substrate | Alexander Kalnitsky, Joseph P. Ellul, Jacques Poirier | 1989-08-22 |
| 4836902 | Method and apparatus for removing coating from substrate | Alexander Kalnitsky, Joseph P. Ellul | 1989-06-06 |