Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6221766 | Method and apparatus for processing refractory metals on semiconductor substrates | — | 2001-04-24 |
| 6075922 | Process for preventing gas leaks in an atmospheric thermal processing chamber | Sing-Pin Tay, Yao Zhi Hu | 2000-06-13 |