Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9111970 | Apparatus for the heat treatment of disc shaped substrates | Patrick Schmid, Eddy Jager | 2015-08-18 |
| 7101812 | Method of forming and/or modifying a dielectric film on a semiconductor surface | Ignaz Eisele, Alexandra Ludsteck, Jörg Schulze, Zsolt Nenyei, Georg Roters | 2006-09-05 |