Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7144826 | Method and apparatus for the production of process gas that includes water vapor and hydrogen formed by burning oxygen in a hydrogen-rich environment | Georg Roters, Helmut Sommer, Genrih Erlikh, Yehuda Pashut | 2006-12-05 |
| 6614005 | Device and method for thermally treating substrates | Heinrich Walk, Werner Blersch, Markus Hauf | 2003-09-02 |
| 5935650 | Method of oxidation of semiconductor wafers in a rapid thermal processing (RTP) system | Wilfried Lerch, Georg Roters, Peter Muenzinger | 1999-08-10 |