Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5935650 | Method of oxidation of semiconductor wafers in a rapid thermal processing (RTP) system | Wilfried Lerch, Georg Roters, Roland Mader | 1999-08-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5935650 | Method of oxidation of semiconductor wafers in a rapid thermal processing (RTP) system | Wilfried Lerch, Georg Roters, Roland Mader | 1999-08-10 |