Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8716153 | Device and method for producing dielectric layers in microwave plasma | Wilfried Lerch, Zsolt Nenyel | 2014-05-06 |
| 7704898 | Method for the thermal treatment of disk-shaped substrates | Zsolt Nenyei, Steffen Frigge, Patrick Schmid, Thorsten Hülsmann | 2010-04-27 |
| 5965047 | Rapid thermal processing (RTP) system with rotating substrate | Werner Blersch, Peter Gruenwald, Michael Maurer, Helmut Merkle, Heinrich Walk | 1999-10-12 |