Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805993 | Device for determining the temperature of a substrate | Hartmut Rick, Wilfried Lerch | 2017-10-31 |
| 6953338 | Device for thermal treatment of substrates | Uwe Kreiser, Karsten Weber, Wilfried Lerch, Michael Grandy, Patrick Schmid +1 more | 2005-10-11 |
| 6830631 | Method for the removing of adsorbed molecules from a chamber | Zsolt Nenyei, Wilfried Lerch, Thomas Graf | 2004-12-14 |
| 6809011 | Adjusting of defect profiles in crystal or crystalline-like structures | Wilfried Lerch | 2004-10-26 |