Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7949237 | Heating configuration for use in thermal processing chambers | Zion Koren, Conor Patrick O'Carroll, Shuen Chun Choy, Paul Janis Timans, Rudy Santo Tomas Cardema +1 more | 2011-05-24 |
| 7269343 | Heating configuration for use in thermal processing chambers | Zion Koren, Conor Patrick O'Carroll, Shuen Chun Choy, Paul Janis Timans, Rudy Santo Tomas Cardema +1 more | 2007-09-11 |
| 6970644 | Heating configuration for use in thermal processing chambers | Zion Koren, Conor Patrick O'Carroll, Shuen Chun Choy, Paul Janis Timans, Rudy Santo Tomas Cardema +1 more | 2005-11-29 |
| 6770146 | Method and system for rotating a semiconductor wafer in processing chambers | Zion Koren, Yorkman Ma, Rudy Santo Tomas Cardema, Lois Gayle Wride, Craig McFarland +1 more | 2004-08-03 |
| 6559424 | Windows used in thermal processing chambers | Conor Patrick O'Carroll, Rudy Santo Tomas Cardema, Zion Koren | 2003-05-06 |
| 5730803 | Apparatus and method for transferring heat from a hot electrostatic chuck to an underlying cold body | Robert Steger, Gregory Shmunis | 1998-03-24 |
| 4962847 | Liquid lift | George L. Pisors | 1990-10-16 |