Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749509 | Temperature control using temperature control element coupled to faraday shield | Dixit V. Desai | 2023-09-05 |
| 6770146 | Method and system for rotating a semiconductor wafer in processing chambers | Zion Koren, Rudy Santo Tomas Cardema, James Tsuneo Taoka, Lois Gayle Wride, Craig McFarland +1 more | 2004-08-03 |