| 7949237 |
Heating configuration for use in thermal processing chambers |
Conor Patrick O'Carroll, Shuen Chun Choy, Paul Janis Timans, Rudy Santo Tomas Cardema, James Tsuneo Taoka +1 more |
2011-05-24 |
| 7269343 |
Heating configuration for use in thermal processing chambers |
Conor Patrick O'Carroll, Shuen Chun Choy, Paul Janis Timans, Rudy Santo Tomas Cardema, James Tsuneo Taoka +1 more |
2007-09-11 |
| 6970644 |
Heating configuration for use in thermal processing chambers |
Conor Patrick O'Carroll, Shuen Chun Choy, Paul Janis Timans, Rudy Santo Tomas Cardema, James Tsuneo Taoka +1 more |
2005-11-29 |
| 6770146 |
Method and system for rotating a semiconductor wafer in processing chambers |
Yorkman Ma, Rudy Santo Tomas Cardema, James Tsuneo Taoka, Lois Gayle Wride, Craig McFarland +1 more |
2004-08-03 |
| 6717158 |
Heating device for heating semiconductor wafers in thermal processing chambers |
Arnon Gat, Bob Bogart, Conor Patrick O'Carroll, Paul Janis Timans, Shuen Chun Choy +1 more |
2004-04-06 |
| 6559424 |
Windows used in thermal processing chambers |
Conor Patrick O'Carroll, Rudy Santo Tomas Cardema, James Tsuneo Taoka |
2003-05-06 |