Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9551569 | Apparatus and method for curvature and thin film stress measurement | Chung-Yuan Wu, Chung-Hua Fu, Bu-Chin Chung | 2017-01-24 |
| 7374335 | In situ optical surface temperature measuring techniques and devices | John P. Gotthold, Terry M. Stapleton, Hung Dang | 2008-05-20 |
| 7080940 | In situ optical surface temperature measuring techniques and devices | John P. Gotthold, Terry M. Stapleton, Hung Dang | 2006-07-25 |
| 6056434 | Apparatus and method for determining the temperature of objects in thermal processing chambers | — | 2000-05-02 |
| 6027244 | Apparatus for determining the temperature of a semi-transparent radiating body | David Egozi | 2000-02-22 |
| 5997175 | Method for determining the temperature of a semi-transparent radiating body | David Egozi | 1999-12-07 |
| 5960158 | Apparatus and method for filtering light in a thermal processing chamber | Arnon Gat, Ram Z. Fabian | 1999-09-28 |
| 5874711 | Apparatus and method for determining the temperature of a radiating surface | Avner Man, Arnon Gat, Ram Z. Fabian | 1999-02-23 |
| 5196901 | Discriminating surface contamination monitor | — | 1993-03-23 |
| 4917499 | Apparatus for analyzing contamination | Richard L. Graff | 1990-04-17 |
| 4861445 | Barrier for molecular contaminates | — | 1989-08-29 |
| 4846425 | Method and apparatus for atomic beam irradiation | — | 1989-07-11 |
| 4808813 | Self contained surface contamination sensor for detecting external particulates and surface discontinuities | — | 1989-02-28 |