Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9617636 | System and method for controlling wafer and thin film surface temperature | Chung-Yuan Wu | 2017-04-11 |
| 9613875 | Method and system for manufacturing semiconductor epitaxy structure | Takashi Kobayashi, Po-Jung Lin, Che-Lin Chen | 2017-04-04 |
| 9551569 | Apparatus and method for curvature and thin film stress measurement | Chung-Yuan Wu, Robert J. Champetier, Chung-Hua Fu | 2017-01-24 |
| 9406536 | Method and system for manufacturing semiconductor epitaxy structure | Takashi Kobayashi, Po-Jung Lin, Che-Lin Chen | 2016-08-02 |
| 5837585 | Method of fabricating flash memory cell | Shye-Lin Wu | 1998-11-17 |
| 5814564 | Etch back method to planarize an interlayer having a critical HDP-CVD deposition process | Liang-Gi Yao, Ruey-Feng Rau, Tony Chang | 1998-09-29 |
| 5587039 | Plasma etch equipment | Siamak Salimian, Michelangelo Delfino | 1996-12-24 |
| 5376223 | Plasma etch process | Siamak Salimian, Michelangelo Delfino | 1994-12-27 |