Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5814564 | Etch back method to planarize an interlayer having a critical HDP-CVD deposition process | Liang-Gi Yao, Tony Chang, Bu-Chin Chung | 1998-09-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5814564 | Etch back method to planarize an interlayer having a critical HDP-CVD deposition process | Liang-Gi Yao, Tony Chang, Bu-Chin Chung | 1998-09-29 |