Issued Patents All Time
Showing 26–47 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9054048 | NH3 containing plasma nitridation of a layer on a substrate | Wei Liu, Christopher S. Olsen, Johanes S. Swenberg | 2015-06-09 |
| 9023700 | Method and apparatus for single step selective nitridation | Udayan Ganguly, Theresa Kramer Guarini, Matthew S. Rogers, Yoshitaka Yokota, Johanes S. Swenberg | 2015-05-05 |
| 8778816 | In situ vapor phase surface activation of SiO2 | Tatsuya Sato, David Thompson, Jeffrey W. Anthis, Vladimir Zubkov, Steven Verhaverbeke +3 more | 2014-07-15 |
| 8748259 | Method and apparatus for single step selective nitridation | Udayan Ganguly, Theresa Kramer Guarini, Matthew S. Rogers, Yoshitaka Yokota, Johanes S. Swenberg | 2014-06-10 |
| 8546273 | Methods and apparatus for forming nitrogen-containing layers | Johanes F. Swenberg, Son T. Nguyen, Wei Liu, Jose Antonio Marin, Jian Li | 2013-10-01 |
| 8481433 | Methods and apparatus for forming nitrogen-containing layers | Johanes F. Swenberg, Son T. Nguyen, Wei Liu, Jose Antonio Marin, Jian Li | 2013-07-09 |
| 7906441 | System and method for mitigating oxide growth in a gate dielectric | Haowen Bu, Hiroaki Niimi, Husam N. Alshareef | 2011-03-15 |
| 7682988 | Thermal treatment of nitrided oxide to improve negative bias thermal instability | Husam N. Alshareef, Rajesh Khamankar, Ajith Varghese, Cathy Chancellor, Anand Krishnan | 2010-03-23 |
| 7423326 | Integrated circuits with composite gate dielectric | Antonio Rotondaro, Luigi Colombo | 2008-09-09 |
| 7402524 | Post high voltage gate oxide pattern high-vacuum outgas surface treatment | Brian K. Kirkpatrick, Rajesh Khamankar, April Gurba, Husam N. Alshareef, Clinton L. Montgomery +1 more | 2008-07-22 |
| 7339240 | Dual-gate integrated circuit semiconductor device | Brian K. Kirkpatrick, Rajesh Khamankar, April Gurba, Husam N. Alshareef, Clinton L. Montgomery +1 more | 2008-03-04 |
| 7049242 | Post high voltage gate dielectric pattern plasma surface treatment | Brian K. Kirkpatrick, Rajesh Khamankar, April Gurba, Husam N. Alshareef, Clinton L. Montgomery +1 more | 2006-05-23 |
| 7045431 | Method for integrating high-k dielectrics in transistor devices | Antonio Rotondaro, Douglas E. Mercer, Luigi Colombo, Mark Visokay, Haowen Bu | 2006-05-16 |
| 7018925 | Post high voltage gate oxide pattern high-vacuum outgas surface treatment | Brian K. Kirkpatrick, Rajesh Khamankar, April Gurba, Husam N. Alshareef, Clinton L. Montgomery +1 more | 2006-03-28 |
| 6921703 | System and method for mitigating oxide growth in a gate dielectric | Haowen Bu, Hiroaki Niimi, Husam N. Alshareef | 2005-07-26 |
| 6919251 | Gate dielectric and method | Antonio Rotondaro, Luigi Colombo | 2005-07-19 |
| 6806149 | Sidewall processes using alkylsilane precursors for MOS transistor fabrication | Haowen Bu | 2004-10-19 |
| 6064066 | Bolometer autocalibration | William L. McCardel, Mark Wadsworth, Glenn H. Westphal | 2000-05-16 |
| 5998809 | Room temperature 3-5 micrometer wavelength HgCdTe heterojunction emitter | Men-Chee Chen | 1999-12-07 |
| 5989933 | Method of forming a cadmium telluride/silicon structure | Hung-Dah Shih | 1999-11-23 |
| 5959299 | Uncooled infrared sensors for the detection and identification of chemical products of combustion | Carlos Castro, Sebastian R. Borrello, Kent R. Carson, Luigi Colombo, Herbert F. Schaake +1 more | 1999-09-28 |
| 5838053 | Method of forming a cadmium telluride/silicon structure | Hung-Dah Shih | 1998-11-17 |