Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355820 | Methods for removing carbon containing films | Naomi Yoshida, Mandar B. Pandit | 2016-05-31 |
| 9177787 | NH3 containing plasma nitridation of a layer of a three dimensional structure on a substrate | Theresa Kramer Guarini | 2015-11-03 |
| 9054048 | NH3 containing plasma nitridation of a layer on a substrate | Malcolm J. Bevan, Christopher S. Olsen, Johanes S. Swenberg | 2015-06-09 |
| 9048190 | Methods and apparatus for processing substrates using an ion shield | Jeffrey Tobin, Bernard L. Hwang, Canfeng Lai, Lara Hawrylchak, Johanes F. Swenberg | 2015-06-02 |
| 6300227 | Enhanced plasma mode and system for plasma immersion ion implantation | Michael A. Bryan, Ian Roth | 2001-10-09 |
| 6213050 | Enhanced plasma mode and computer system for plasma immersion ion implantation | Michael A. Bryan, Ian Roth | 2001-04-10 |