Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8894767 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Xinglong Chen, Matthew L. Miller +5 more | 2014-11-25 |
| 8524004 | Loadlock batch ozone cure | Dmitry Lubomirsky, Jay D. Pinson, II, Kirby H. Floyd, Shankar Venkataraman | 2013-09-03 |