Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9287124 | Method of etching a boron doped carbon hardmask | Byungkook Kong, Jun Wan Kim, Jeong Hyun Yoo, Hun Sang Kim | 2016-03-15 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9287124 | Method of etching a boron doped carbon hardmask | Byungkook Kong, Jun Wan Kim, Jeong Hyun Yoo, Hun Sang Kim | 2016-03-15 |