Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12410523 | Integrated low k recovery and ALD metal deposition process for advanced technology node | Xinyi Lu, Fredrick J. Kim, Bo Xie, Chi-I Lang, Li-Qun Xia +1 more | 2025-09-09 |