Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12196491 | Adaptive baking method | Tzung-Chen Wu, Heng-Jen Lee, Ho-yung David Hwang | 2025-01-14 |
| 12025917 | System and method for supplying and dispensing bubble-free photolithography chemical solutions | Heng-Jen Lee, Hsu-Yuan Liu, Yu-Chen Huang, Cheng-Han Wu, Shih-Che Wang +1 more | 2024-07-02 |
| D940250 | Bubble blower | Minglang Lu, Zhonggen Chen, Junjie Du, Jian J. Chen | 2022-01-04 |
| 11204200 | Adaptive baking method | Tzung-Chen Wu, Heng-Jen Lee, Ho-yung David Hwang | 2021-12-21 |
| 10558120 | System and method for supplying and dispensing bubble-free photolithography chemical solutions | Heng-Jen Lee, Hsu-Yuan Liu, Yu-Chen Huang, Cheng-Han Wu, Shih-Che Wang +1 more | 2020-02-11 |
| 10274839 | Two-dimensional marks | Heng-Jen Lee, Chen-Ming Wang, Kai-Hsiung Cheng, Chih-Ming Ke, Ho-yung David Hwang | 2019-04-30 |
| 10006717 | Adaptive baking system and method of using the same | Tzung-Chen Wu, Heng-Jen Lee, Ho-yung David Hwang | 2018-06-26 |
| 9817315 | System and method for supplying and dispensing bubble-free photolithography chemical solutions | Heng-Jen Lee, Hsu-Yuan Liu, Yu-Chen Huang, Cheng-Han Wu, Shih-Che Wang +1 more | 2017-11-14 |
| 9766554 | Method and apparatus for estimating focus and dose of an exposure process | Yen-Liang Chen, Chih-Ming Ke, Kai-Hsiung Chen | 2017-09-19 |
| 9690212 | Hybrid focus-exposure matrix | Heng-Jen Lee, Yen-Liang Chen, Kai-Hsiung Chen, Chih-Ming Ke, Ho-yung David Hwang | 2017-06-27 |
| 9034720 | Litho scanner alignment signal improvement | Hui-Hsien Liu, Zheng Zou, Qun Ying Lin, Alex See | 2015-05-19 |
| 8987134 | Reliable interconnect for semiconductor device | Zhehui Wang, Kwee Liang Yeo, Hai Cong, Huang Liu | 2015-03-24 |
| 8828858 | Spacer profile engineering using films with continuously increased etch rate from inner to outer surface | Xuesong Rao, Chim Seng Seet, Hai Cong, Zheng Zou, Alex See +2 more | 2014-09-09 |
| 8492236 | Step-like spacer profile | Xuesong Rao, Chim Seng Seet, Hai Cong, Zheng Zou, Alex See +3 more | 2013-07-23 |
| 7966142 | Multi-variable regression for metrology | Zheng Zou, Jasper Goh, Mei Sheng Zhou | 2011-06-21 |
| 7553678 | Method for detecting semiconductor manufacturing conditions | Jin Yu, Kai Hung Alex See | 2009-06-30 |
| 7527900 | Reticle and optical proximity correction method | Jin Yu, Kai Hung Alex See | 2009-05-05 |
| 7238619 | Method for eliminating bridging defect in via first dual damascene process | Hong Ma, Kuang-Yeh Chang | 2007-07-03 |
| 6777145 | In-line focus monitor structure and method using top-down SEM | Hui-Kow Lim, Teng-Hwee Ng, Ron Lopez, Goswami Indranil | 2004-08-17 |