Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705366 | Methods for controllable metal and barrier-liner recess | He Ren, Amrita B. Mullick, Regina Freed, Mehul Naik | 2023-07-18 |
| 11437274 | Fully self-aligned via | Regina Freed, Madhur Sachan, Susmit Singha Roy, Gabriela Alva, Ho-yung David Hwang +4 more | 2022-09-06 |
| 11232955 | Methods of etching metal oxides with less etch residue | Amrita B. Mullick, Abhijit Basu Mallick, Srinivas Gandikota, Susmit Singha Roy, Yingli Rao +1 more | 2022-01-25 |
| 11164938 | DRAM capacitor module | Regina Freed, Ho-yung David Hwang, Sanjay Natarajan, Lequn Liu | 2021-11-02 |
| 11062942 | Methods for controllable metal and barrier-liner recess | He Ren, Amrita B. Mullick, Regina Freed, Mehul Naik | 2021-07-13 |
| 11037825 | Selective removal process to create high aspect ratio fully self-aligned via | Amrita B. Mullick, Madhur Sachan, He Ren, Swaminathan Srinivasan, Regina Freed | 2021-06-15 |
| 10892187 | Method for creating a fully self-aligned via | Regina Freed, Sanjay Natarajan | 2021-01-12 |
| 10892183 | Methods for removing metal oxides | Amrita B. Mullick, Regina Freed | 2021-01-12 |
| 10790191 | Selective removal process to create high aspect ratio fully self-aligned via | Amrita B. Mullick, Madhur Sachan, He Ren, Swaminathan Srinivasan, Regina Freed | 2020-09-29 |
| 10699953 | Method for creating a fully self-aligned via | Amrita B. Mullick, Nitin K. Ingle, Xikun Wang, Regina Freed, Ho-yung David Hwang | 2020-06-30 |
| 10622221 | Methods of etching metal oxides with less etch residue | Amrita B. Mullick, Abhijit Basu Mallick, Srinivas Gandikota, Susmit Singha Roy, Yingli Rao +1 more | 2020-04-14 |
| 10600688 | Methods of producing self-aligned vias | Ying Zhang, Regina Freed, Nitin K. Ingle, Ho-yung David Hwang | 2020-03-24 |
| 10593594 | Selectively etched self-aligned via processes | Yung-Chen Lin, Qingjun Zhou, Ying Zhang, Ho-yung David Hwang, Regina Freed | 2020-03-17 |
| 10573555 | Methods of producing self-aligned grown via | Ying Zhang, Regina Freed, Nitin K. Ingle, Ho-yung David Hwang, Abhijit Basu Mallick | 2020-02-25 |
| 10553485 | Methods of producing fully self-aligned vias and contacts | Ying Zhang, Regina Freed, Nitin K. Ingle, Ho-yung David Hwang, Abhijit Basu Mallick +1 more | 2020-02-04 |
| 10522404 | Fully self-aligned via | Ying Zhang, Abhijit Basu Mallick, Regina Freed, Nitin K. Ingle, Ho-yung David Hwang | 2019-12-31 |
| 10510602 | Methods of producing self-aligned vias | Ying Zhang, Abhijit Basu Mallick, Yung-Chen Lin, Qingjun Zhou, He Ren +1 more | 2019-12-17 |
| 10424507 | Fully self-aligned via | Ying Zhang, Abhijit Basu Mallick, Regina Freed, Nitin K. Ingle, Ho-yung David Hwang | 2019-09-24 |
| 10410921 | Fully self-aligned via | Ying Zhang, Abhijit Basu Mallick, Regina Freed, Nitin K. Ingle, Ho-yung David Hwang | 2019-09-10 |
| 9978596 | Self-aligned multiple spacer patterning schemes for advanced nanometer technology | Ying Zhang, Praburam Gopalraja, Srinivas D. Nemani, Hua Chung | 2018-05-22 |
| 9548201 | Self-aligned multiple spacer patterning schemes for advanced nanometer technology | Ying Zhang, Praburam Gopalraja, Srinivas D. Nemani, Hua Chung | 2017-01-17 |
| 8101525 | Method for fabricating a semiconductor device having a lanthanum-family-based oxide layer | Meihua Shen, Noel Sun, Nicolas Gani, Han-Hsiang Chen, Eric Pei +3 more | 2012-01-24 |
| 5250444 | Rapid plasma hydrogenation process for polysilicon MOSFETs | Babar A. Khan, Barbara A. Rossi | 1993-10-05 |