Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374557 | Methods for etching structures with oxygen pulsing | Nancy Fung | 2025-07-29 |
| 11658042 | Methods for etching structures and smoothing sidewalls | Nancy Fung | 2023-05-23 |
| 11527414 | Methods for etching structures with oxygen pulsing | Nancy Fung | 2022-12-13 |
| 11437274 | Fully self-aligned via | Regina Freed, Madhur Sachan, Susmit Singha Roy, Ho-yung David Hwang, Uday Mitra +4 more | 2022-09-06 |