Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Fully self-aligned via

Fully self-aligned via

US Patent 10424507 · Granted Sep 24, 2019

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Self-aligned wide backside power rail contacts to multiple transistor sources2025
Pulsed plasma (DC/RF) deposition of high quality C films for patterning2025
Processes for depositing SiB films2025
High density carbon films for patterning applications2025
Electronic device fabrication using area-selective deposition2025
Selective etching between silicon-and-germanium-containing materials with varyin2025
Dry develop process of photoresist2025
Semiconductor chamber components with advanced dual layer nickel-containing coat2025
Selective etching of silicon-and-germanium-containing materials with increased s2025
Deposition of boron films2025
Low temperature graphene growth2025
Low temperature graphene growth2025