Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10558120 | System and method for supplying and dispensing bubble-free photolithography chemical solutions | Wen-Zhan Zhou, Heng-Jen Lee, Hsu-Yuan Liu, Yu-Chen Huang, Cheng-Han Wu +1 more | 2020-02-11 |
| 10553485 | Methods of producing fully self-aligned vias and contacts | Ying Zhang, Regina Freed, Nitin K. Ingle, Uday Mitra, Abhijit Basu Mallick +1 more | 2020-02-04 |
| 10522404 | Fully self-aligned via | Ying Zhang, Abhijit Basu Mallick, Regina Freed, Nitin K. Ingle, Uday Mitra | 2019-12-31 |
| 10510540 | Mask scheme for cut pattern flow with enlarged EPE window | Ying Zhang, Qingjun Zhou, Yung-Chen Lin | 2019-12-17 |
| 10510602 | Methods of producing self-aligned vias | Ying Zhang, Abhijit Basu Mallick, Yung-Chen Lin, Qingjun Zhou, He Ren +1 more | 2019-12-17 |
| 10424507 | Fully self-aligned via | Ying Zhang, Abhijit Basu Mallick, Regina Freed, Nitin K. Ingle, Uday Mitra | 2019-09-24 |
| 10410921 | Fully self-aligned via | Ying Zhang, Abhijit Basu Mallick, Regina Freed, Nitin K. Ingle, Uday Mitra | 2019-09-10 |
| 10274839 | Two-dimensional marks | Wen-Zhan Zhou, Heng-Jen Lee, Chen-Ming Wang, Kai-Hsiung Cheng, Chih-Ming Ke | 2019-04-30 |
| 10006717 | Adaptive baking system and method of using the same | Tzung-Chen Wu, Wen-Zhan Zhou, Heng-Jen Lee | 2018-06-26 |
| 9817315 | System and method for supplying and dispensing bubble-free photolithography chemical solutions | Wen-Zhan Zhou, Heng-Jen Lee, Hsu-Yuan Liu, Yu-Chen Huang, Cheng-Han Wu +1 more | 2017-11-14 |
| 9690212 | Hybrid focus-exposure matrix | Wen-Zhan Zhou, Heng-Jen Lee, Yen-Liang Chen, Kai-Hsiung Chen, Chih-Ming Ke | 2017-06-27 |
| 9153435 | Reducing wafer distortion through a high CTE layer | Chi-Ming Chen, Chung-Yi Yu, Chia-Shiung Tsai | 2015-10-06 |
| 9123671 | Silicon wafer strength enhancement | Chi-Ming Chen, Chung-Yi Yu, Chia-Shiung Tsai, Alexander Kalnitsky | 2015-09-01 |
| 8791504 | Substrate breakdown voltage improvement for group III-nitride on a silicon substrate | Chi-Ming Chen, Po-Chun Liu, Hung-Ta Lin, Chin-Cheng Chang, Chung-Yi Yu +1 more | 2014-07-29 |
| 8772831 | III-nitride growth method on silicon substrate | Chi-Ming Chen, Po-Chun Liu, Hung-Ta Lin, Chin-Cheng Chang, Chung-Yi Yu +1 more | 2014-07-08 |
| 8723185 | Reducing wafer distortion through a high CTE layer | Chi-Ming Chen, Chung-Yi Yu, Chia-Shiung Tsai | 2014-05-13 |
| 8624326 | FinFET device and method of manufacturing same | Chi-Ming Chen, Chung-Yi Yu | 2014-01-07 |
| 8476146 | Reducing wafer distortion through a low CTE layer | Chi-Ming Chen, Chung-Yi Yu, Chia-Shiung Tsai | 2013-07-02 |