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Home › Real time bias detection and correction for electrostatic chuck

Real time bias detection and correction for electrostatic chuck

US Patent 11594440 · Granted Feb 28, 2023

Estimated economic value: $49,197,000 ⓘ

Assignee

Applied Materials

Inventors

Jian Li (36 patents)
Juan Carlos Rocha-Alvarez (153 patents)
Dmitry A. Dzilno (37 patents)

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