Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11573322 | Laser speed measuring method, control device and laser velocimeter | Shangmin Sun, Yongming Wang, Yanwei Xu, Weifeng Yu, Yu-Hsiang Hu +1 more | 2023-02-07 |
| 11501993 | Semiconductor substrate supports with improved high temperature chucking | Juan Carlos Rocha-Alvarez, Zheng John Ye, Daemian Raj Benjamin Raj, Shailendra Srivastava, Xinhai Han +3 more | 2022-11-15 |
| 11499229 | Substrate supports including metal-ceramic interfaces | Chidambara A. Ramalingam, Juan Carlos Rocha, Joseph M. Polese, Katty Marie Lydia Gamon Guyomard | 2022-11-15 |
| 11133212 | High temperature electrostatic chuck | Abdul Aziz Khaja, Jun Ma, Hyung Je Woo, Fei Wu | 2021-09-28 |
| 10892147 | Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers | Sairaju Tallavarjula, Kailash Pradhan, Huy Q. Nguyen | 2021-01-12 |
| 9865438 | Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers | Sairaju Tallavarjula, Kailash Pradhan, Huy Q. Nguyen | 2018-01-09 |
| 9490326 | Wafer formed by slicing an ingot | Wen-Ching Hsu | 2016-11-08 |
| 9051664 | Nanostructuring process for ingot surface, water manufacturing method, and wafer using the same | Jiunn-Yih Chyan, Kun Yang, Wen-Ching Hsu | 2015-06-09 |
| 8546273 | Methods and apparatus for forming nitrogen-containing layers | Malcolm J. Bevan, Johanes F. Swenberg, Son T. Nguyen, Wei Liu, Jose Antonio Marin | 2013-10-01 |
| 8481433 | Methods and apparatus for forming nitrogen-containing layers | Malcolm J. Bevan, Johanes F. Swenberg, Son T. Nguyen, Wei Liu, Jose Antonio Marin | 2013-07-09 |
| 8101906 | Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers | Sairaju Tallavarjula, Kailash Pradhan, Huy Q. Nguyen | 2012-01-24 |