Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403507 | Transfer apparatus, cleaning module, and substrate processing apparatus | Asagi Matsugu, Akihiro Yazawa, Manato Furusawa, Hideharu Aoyama, Ayumu Saito +4 more | 2025-09-02 |