| 10166647 |
Polishing apparatus and polishing method |
Tamami Takahashi, Masaya Seki, Kenji Yamaguchi, Masayuki Nakanishi |
2019-01-01 |
| 10137552 |
Polishing apparatus |
Kazuaki Maeda, Tamami Takahashi, Masaya Seki |
2018-11-27 |
| 9649739 |
Polishing apparatus |
Kazuaki Maeda, Tamami Takahashi, Masaya Seki |
2017-05-16 |
| 9517544 |
Polishing apparatus and polishing method |
Tamami Takahashi, Masaya Seki, Kenji Yamaguchi, Masayuki Nakanishi |
2016-12-13 |
| 9138854 |
Polishing apparatus |
Kazuaki Maeda, Tamami Takahashi, Masaya Seki |
2015-09-22 |
| 8986069 |
Polishing apparatus and polishing method |
Tamami Takahashi, Masaya Seki, Kenji Yamaguchi, Masayuki Nakanishi |
2015-03-24 |
| 8771038 |
Polishing apparatus |
Toshifumi Kimba, Masaki Fujii |
2014-07-08 |
| 8506362 |
Polishing apparatus and polishing method |
Dai Fukushima, Atsushi Shigeta, Tamami Takahashi, Kenya Ito, Masaya Seki |
2013-08-13 |
| 8506363 |
Substrate holder and substrate holding method |
Tamami Takahashi, Masaya Seki |
2013-08-13 |
| 8414355 |
Substrate processing apparatus |
Toshifumi Kimba |
2013-04-09 |
| 8187055 |
Polishing apparatus and polishing method |
Tamami Takahashi, Masaya Seki, Kenji Yamaguchi, Masayuki Nakanishi |
2012-05-29 |
| 8047896 |
Polishing apparatus, polishing method, and processing apparatus |
Tamami Takahashi, Kenya Ito, Masaya Seki |
2011-11-01 |
| 7976361 |
Polishing apparatus and polishing method |
Tamami Takahashi, Masaya Seki, Kenya Ito |
2011-07-12 |