| 11604150 |
Device for measuring bump height, apparatus for processing substrate, method of measuring bump height, and storage medium |
Takahisa Okuzono, Masaki Tomita, Jumpei Fujikata |
2023-03-14 |
| 11535949 |
Substrate holder and plating apparatus |
Masaya Seki, Kiyoshi Suzuki, Masayuki Satake, Jumpei Fujikata |
2022-12-27 |
| 11230789 |
Method of removing liquid from seal of a substrate holder |
Masaya Seki, Kiyoshi Suzuki, Masayuki Satake, Jumpei Fujikata |
2022-01-25 |
| 10611027 |
Assembly apparatus and control method therefor |
Yuji Kobori, Makoto Tonegawa |
2020-04-07 |
| 7850509 |
Substrate holding apparatus |
Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more |
2010-12-14 |
| 7491117 |
Substrate holding apparatus |
Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more |
2009-02-17 |
| 7156725 |
Substrate polishing machine |
Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more |
2007-01-02 |
| 7083507 |
Substrate holding apparatus |
Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more |
2006-08-01 |
| 6852019 |
Substrate holding apparatus |
Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more |
2005-02-08 |