Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11604150 | Device for measuring bump height, apparatus for processing substrate, method of measuring bump height, and storage medium | Takahisa Okuzono, Masaki Tomita, Jumpei Fujikata | 2023-03-14 |
| 11535949 | Substrate holder and plating apparatus | Masaya Seki, Kiyoshi Suzuki, Masayuki Satake, Jumpei Fujikata | 2022-12-27 |
| 11230789 | Method of removing liquid from seal of a substrate holder | Masaya Seki, Kiyoshi Suzuki, Masayuki Satake, Jumpei Fujikata | 2022-01-25 |
| 10611027 | Assembly apparatus and control method therefor | Yuji Kobori, Makoto Tonegawa | 2020-04-07 |
| 7850509 | Substrate holding apparatus | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more | 2010-12-14 |
| 7491117 | Substrate holding apparatus | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more | 2009-02-17 |
| 7156725 | Substrate polishing machine | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more | 2007-01-02 |
| 7083507 | Substrate holding apparatus | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more | 2006-08-01 |
| 6852019 | Substrate holding apparatus | Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima +4 more | 2005-02-08 |