Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11604150 | Device for measuring bump height, apparatus for processing substrate, method of measuring bump height, and storage medium | Masaki Tomita, Jumpei Fujikata, Hideki Takayanagi | 2023-03-14 |
| 11371155 | Method and apparatus for processing a substrate | Jumpei Fujikata | 2022-06-28 |
| 10910334 | Device for inspecting a bump height surrounded by resist, device for processing a substrate, method for inspecting a bump height, and storage medium | Masaki Tomita, Jumpei Fujikata | 2021-02-02 |
| 10508352 | Method and apparatus for processing a substrate | Jumpei Fujikata | 2019-12-17 |