Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11426834 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2022-08-30 |
| 10486285 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2019-11-26 |
| 9687957 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2017-06-27 |
| 9358662 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2016-06-07 |
| 8795032 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2014-08-05 |
| 7736474 | Plating apparatus and plating method | Keiichi Kurashina, Mizuki Nagai, Satoru Yamamoto, Hiroyuki Kanda, Koji Mishima +7 more | 2010-06-15 |
| 7037853 | Wafer cleaning apparatus | Akihisa Hongo | 2006-05-02 |
| 6921466 | Revolution member supporting apparatus and semiconductor substrate processing apparatus | Akihisa Hongo, Ichiro Katakabe | 2005-07-26 |
| 6745784 | Method of and apparatus for cleaning substrate | Ichiro Katakabe, Haruko Ohno, Sachiko Kihara, Akira Fukunaga | 2004-06-08 |
| 6615854 | Wafer cleaning apparatus | Akihisa Hongo | 2003-09-09 |
| 6558478 | Method of and apparatus for cleaning substrate | Ichiro Katakabe, Haruko Ohno, Sachiko Kihara, Akira Fukunaga | 2003-05-06 |