Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776919 | Method and apparatus for etching ruthenium films | Akira Fukunaga, Haruko Ohno, Ichiro Katakabe | 2004-08-17 |
| 6745784 | Method of and apparatus for cleaning substrate | Ichiro Katakabe, Shinya Morisawa, Haruko Ohno, Akira Fukunaga | 2004-06-08 |
| 6558478 | Method of and apparatus for cleaning substrate | Ichiro Katakabe, Shinya Morisawa, Haruko Ohno, Akira Fukunaga | 2003-05-06 |