Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11251017 | Method for evaluating secondary optical system of electron beam inspection device | — | 2022-02-15 |
| 11217421 | Adjustment method and electron beam device | Ryo Tajima, Tatsuya Kohama, Kenji Watanabe, Tsutomu Karimata | 2022-01-04 |
| 10157722 | Inspection device | Masahiro Hatakeyama, Shoji Yoshikawa, Takeshi Murakami, Kenji Watanabe, Yoshihiko Naito +5 more | 2018-12-18 |
| 9728374 | Inspection apparatus | Masahiro Hatakeyama, Shinji Yamaguchi, Masato Naka | 2017-08-08 |
| 9368322 | Inspection apparatus | Masahiro Hatakeyama, Shinji Yamaguchi, Masato Naka | 2016-06-14 |
| 9105444 | Electro-optical inspection apparatus and method with dust or particle collection function | Kenji Watanabe, Masahiro Hatakeyama, Yoshihiko Naito, Tatsuya Kohama, Kenji Terao +4 more | 2015-08-11 |
| 8624182 | Electro-optical inspection apparatus and method with dust or particle collection function | Kenji Watanabe, Masahiro Hatakeyama, Yoshihiko Naito, Tatsuya Kohama, Kenji Terao +4 more | 2014-01-07 |
| 8497476 | Inspection device | Masahiro Hatakeyama, Shoji Yoshikawa, Takeshi Murakami, Kenji Watanabe, Yoshihiko Naito +5 more | 2013-07-30 |
| 5351836 | Container for plate-like objects | Shoichi Mori | 1994-10-04 |