Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11978195 | Inspection method and inspection apparatus | Keisuke CHIBA, Ryoji Yoshikawa | 2024-05-07 |
| 10586322 | Method for detecting coordinates, coordinate output device and defect inspection device | — | 2020-03-10 |
| 10486203 | Substrate production method, substrate processing apparatus, and substrate production system | Hideaki Sakurai, Kyo Otsubo, Kenji Masui, Tetsuo TAKEMOTO, Minako Inukai | 2019-11-26 |
| 10096100 | Inspection device, inspection method, and image processing program | — | 2018-10-09 |
| 9728374 | Inspection apparatus | Takehide Hayashi, Masahiro Hatakeyama, Shinji Yamaguchi | 2017-08-08 |
| 9368322 | Inspection apparatus | Takehide Hayashi, Masahiro Hatakeyama, Shinji Yamaguchi | 2016-06-14 |
| 8669522 | Mask inspection apparatus and mask inspection method | Shinji Yamaguchi, Hiroyuki Kashiwagi, Masamitsu Itoh | 2014-03-11 |