Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11978195 | Inspection method and inspection apparatus | Keisuke CHIBA, Masato Naka | 2024-05-07 |
| 11906440 | Inspection device and inspection method | — | 2024-02-20 |
| 11664190 | Electron beam device and image acquisition method | — | 2023-05-30 |
| 10976656 | Defect inspection device and defect inspection method | — | 2021-04-13 |
| 9894271 | Pattern inspection apparatus and pattern inspection method | Tatsuhiko Higashiki, Seiji Morita, Takashi Hirano | 2018-02-13 |
| 9244343 | Pattern forming method and mask pattern data | Hideaki Sakurai, Shunsuke Ochiai | 2016-01-26 |
| 8811713 | Photomask inspection method, semiconductor device inspection method, and pattern inspection apparatus | — | 2014-08-19 |
| 8358340 | Pattern inspection device and method of inspecting pattern | Tomohide Watanabe, Hiromu Inoue, Hiroyuki Ikeda, Hiroyuki Tanizaki | 2013-01-22 |
| 7742162 | Mask defect inspection data generating method, mask defect inspection method and mask production method | Tomohiro Tsutsui, Osamu Ikenaga | 2010-06-22 |
| 7602961 | Reference data generating method, pattern defect checking apparatus, pattern defect checking method, reference data generating program, and semiconductor device manufacturing method | Hidehiro Watanabe | 2009-10-13 |