Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8358340 | Pattern inspection device and method of inspecting pattern | Ryoji Yoshikawa, Hiromu Inoue, Hiroyuki Ikeda, Hiroyuki Tanizaki | 2013-01-22 |
| 7394048 | Focusing device, focusing method and a pattern inspecting apparatus | Hiromu Inoue, Satoshi Endo, Masami Ikeda | 2008-07-01 |
| 5602645 | Pattern evaluation apparatus and a method of pattern evaluation | Mitsuo Tabata, Toru Tojo, Kiminobu Akeno, Toshiyuki Watanabe, Eiji Yamanaka +2 more | 1997-02-11 |
| 5379348 | Pattern defects inspection system | Toshiyuki Watanabe, Hideo Tsuchiya, Toru Tojo | 1995-01-03 |
| 4743768 | Method and apparatus for measuring non-linearity of a pattern edge | — | 1988-05-10 |
| 4577095 | Automatic focusing apparatus for a semiconductor pattern inspection system | — | 1986-03-18 |
| 4230940 | Automatic focusing apparatus | Masana Minami | 1980-10-28 |