Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7068364 | Pattern inspection apparatus | Shinji Sugihara, Hideo Tsuchiya, Yasushi Sanada | 2006-06-27 |
| 6909501 | Pattern inspection apparatus and pattern inspection method | Riki Ogawa, Yasushi Sanada | 2005-06-21 |
| 6100970 | Apparatus for inspecting slight defects on a photomask pattern | Hisakazu Yoshino, Akihiko Sekine, Toru Tojo | 2000-08-08 |
| 6084716 | Optical substrate inspection apparatus | Yasushi Sanada, Toru Tojo, Kyoji Yamashita, Hideo Nagai, Noboru Kobayashi +3 more | 2000-07-04 |
| 5995219 | Pattern defect inspection apparatus | — | 1999-11-30 |
| 5960106 | Sample inspection apparatus and sample inspection method | Hideo Tsuchiya, Toru Tojo, Toshiyuki Watanabe, Eiichi Kobayashi | 1999-09-28 |
| 5828457 | Sample inspection apparatus and sample inspection method | Toru Tojo, Hisakazu Yoshino | 1998-10-27 |
| 5812259 | Method and apparatus for inspecting slight defects in a photomask pattern | Hisakazu Yoshino, Akihiko Sekine, Toru Tojo | 1998-09-22 |
| 5744381 | Method of inspecting a pattern formed on a sample for a defect, and an apparatus thereof | Toru Tojo, Toshiyuki Watanabe, Hideo Tsuchiya | 1998-04-28 |
| 5602645 | Pattern evaluation apparatus and a method of pattern evaluation | Toru Tojo, Kiminobu Akeno, Toshiyuki Watanabe, Tomohide Watanabe, Eiji Yamanaka +2 more | 1997-02-11 |
| 5404410 | Method and system for generating a bit pattern | Toru Tojo, Hideo Tsuchiya, Kyoji Yamashita, Ryoichi Yoshikawa | 1995-04-04 |
| 4811062 | Method for aligning first and second objects relative to each other and apparatus for practicing this method | Toru Tojo, Hiroaki Shimozono | 1989-03-07 |
| 4808002 | Method and device for aligning first and second objects relative to each other | Toru Tojo, Hisakazu Yoshino | 1989-02-28 |
| 4698513 | Position detector by vibrating a light beam for averaging the reflected light | Toru Tojo | 1987-10-06 |
| 4642468 | Position detecting method for detecting the relative positions of the first and second members | Nobuo Shibuya | 1987-02-10 |
| 4590382 | Method of aligning two members utilizing marks provided thereon | — | 1986-05-20 |
| 4572956 | Electron beam pattern transfer system having an autofocusing mechanism | Toru Tojo, Ichiro Mori, Toshiaki Shinozaki, Kazuyoshi Sugihara, Chikara Itoh | 1986-02-25 |
| 4545068 | Image processing system | Masatsugu Kidode, Noboru Yamaguchi | 1985-10-01 |
| 4326202 | Image memory device | Masatsugu Kidode, Haruo Asada | 1982-04-20 |