Issued Patents All Time
Showing 1–25 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12265043 | Inspection apparatus | — | 2025-04-01 |
| 11385192 | Inspection apparatus and inspection method | Masataka Shiratsuchi, Hiromu Inoue | 2022-07-12 |
| 11189459 | Multibeam inspection apparatus | Hideaki Hashimoto | 2021-11-30 |
| 11101103 | Multiple electron beam inspection apparatus and multiple electron beam inspection method | Masataka Shiratsuchi, Hiromu Inoue | 2021-08-24 |
| 11004657 | Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus, and multiple electron beam irradiation method | Shinji Sugihara | 2021-05-11 |
| 11004193 | Inspection method and inspection apparatus | Ryoichi Hirano, Hideo Tsuchiya, Masataka Shiratsuchi, Hideaki Hashimoto | 2021-05-11 |
| 10984978 | Multiple electron beam inspection apparatus and multiple electron beam inspection method | Hiromu Inoue, Ryoichi Hirano, Masataka Shiratsuchi | 2021-04-20 |
| 10984525 | Pattern inspection method and pattern inspection apparatus | Ryoichi Hirano, Hideo Tsuchiya, Masataka Shiratsuchi, Hideaki Hashimoto | 2021-04-20 |
| 10846846 | Pattern inspection apparatus and pattern inspection method | Masataka Shiratsuchi, Hideaki Hashimoto, Kazuhiro Nakashima, Ryoichi Hirano, Hideo Tsuchiya +1 more | 2020-11-24 |
| 10775326 | Electron beam inspection apparatus and electron beam inspection method | Hideo Tsuchiya, Masataka Shiratsuchi, Ryoichi Hirano, Hideaki Hashimoto | 2020-09-15 |
| 10768126 | Multiple charged particle beam inspection apparatus and multiple charged particle beam inspection method | — | 2020-09-08 |
| 10734190 | Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus and multiple electron beam irradiation method | Atsushi Ando, Munehiro Ogasawara, John G. Hartley | 2020-08-04 |
| 10727026 | Charged particle beam inspection method | Chosaku Noda | 2020-07-28 |
| 10719928 | Pattern inspection apparatus and pattern inspection method | Toshiaki OTAKI | 2020-07-21 |
| 10712295 | Electron beam inspection apparatus and electron beam inspection method | Hideo Tsuchiya, Masataka Shiratsuchi, Ryoichi Hirano, Hideaki Hashimoto | 2020-07-14 |
| 10655956 | Displacement measuring apparatus, electron beam inspection apparatus, and displacement measuring method | Hiroyuki Nagahama | 2020-05-19 |
| 10643327 | Inspection method and inspection apparatus | — | 2020-05-05 |
| 10636138 | Polarized image acquisition apparatus, pattern inspection apparatus, polarized image acquisition method, and pattern inspection method | — | 2020-04-28 |
| 10488180 | Mask inspection apparatus and mask inspection method | Yasuhiro Yamashita | 2019-11-26 |
| 10444487 | Polarized image acquisition apparatus, pattern inspection apparatus, polarized image acquisition method, and pattern inspection method | — | 2019-10-15 |
| 10410335 | Inspection method and inspection apparatus | Masatoshi Hirono | 2019-09-10 |
| 10401299 | Image capturing apparatus and inspection apparatus and inspection method | — | 2019-09-03 |
| 10386308 | Pattern inspection apparatus for detecting a pattern defect | Toshiaki OTAKI | 2019-08-20 |
| 10359370 | Template substrate for use in adjusting focus offset for defect detection | Hideo Tsuchiya | 2019-07-23 |
| 10282635 | Pattern inspection apparatus | — | 2019-05-07 |